Applied Science & Technology 210 / Electrical Engineering 213: Soft X-Rays and Extreme Ultraviolet Radiation
Lecture 1: Introduction, part A
http://www.coe.berkeley.edu/AST/sxreuv/

Professor David T. Attwood, Electrical Engineering Professor in Residence, Professor Attwood’s research interests include short wavelength electromagnetics, soft x-ray microscopy, coherence, and EUV lithography.